Machinedesign 6247 Omega Fma7400 7500 P 0

Multigas flowmeters/controllers

Jan. 6, 2014

The FMA7400/7500 (elastomer seal) and (-SS) (metal seal) Series thermal-mass flowmeters and controllers overcome the limitation of many thermal-mass flow units when changing gas types. The unit’s database is built on thousands of native gas runs to establish correction functions that account for both thermal and physical differences among gases.

Denise Greco

The FMA7400/7500 (elastomer seal) and (-SS) (metal seal) Series thermal-mass flowmeters and controllers overcome the limitation of many thermal-mass flow units when changing gas types.

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The unit’s database is built on thousands of native gas runs to establish correction functions that account for both thermal and physical differences among gases.

The Series features a corrosion-resistant Hastelloy C-22 sensor for long-term operation. Settling time is less than a second and full-scale accuracy is 1%. Both versions achieve internal to external leak integrity for process gases found in CVD, solar, and other processes.

Specifications include 3 sccm to 50 slm (depending on model number) full-scale flow range; flow accuracy of ±1% set-point 35 to 100%, ±0.35% full scale 2 to 35%, ±3% with selected gas feature; < 0.2% S.P. repeatability and reproducibility; ±0.5% full scale (included in accuracy) linearity; and <1 sec (within 2% for steps 0 to 10 through 0 to 100%) response (settling) time.

Omega Engineering Inc., One Omega Dr., Box 4047, Stamford, CT 06907, (888) 826-6342, www.omega.com