Measuring Temperatures in Furnaces with Oxidizing Atmospheres

Measuring Temperatures in Furnaces with Oxidizing Atmospheres

Sponsored by OMEGA

Measuring temperatures inside a furnace can present several challenges: high temperatures, temperature cycling, and hostile atmospheres exceeding the limits of many measurement devices while others have greatly reduced lifetimes and poor accuracy. This article approaches mainly two specific challenges related to temperature measurement in furnaces: types of oxidizing and reducing atmospheres in furnaces used in microelectronics fabrication.


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