Machine Design

Nanopositioning And Scanning System

The P-587.6CD piezo-driven nanopositioning and scanning system targets industrial OEM applications including nanometrology, nanofabrication, scanning microscopy, optics, and mask alignment.

The six-axis device has precision trajectory control and millisecond responsiveness and features capacitive displacement sensors with a high bandwidth. The system sports an integrated autocalibration function for fast setup.

PI-USA, 16 Albert St., Auburn, MA 01501, (508) 832-3456,

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