Machinedesign 7486 Mdwhitepaper 4 0
Machinedesign 7486 Mdwhitepaper 4 0
Machinedesign 7486 Mdwhitepaper 4 0
Machinedesign 7486 Mdwhitepaper 4 0
Machinedesign 7486 Mdwhitepaper 4 0

Measuring Temperatures in Furnaces with Oxidizing Atmospheres

May 9, 2016
Sponsored by OMEGA
Measuring temperatures inside a furnace can present several challenges: high temperatures, temperature cycling, and hostile atmospheres exceeding the limits of many measurement devices while others have greatly reduced lifetimes and poor accuracy. This article approaches mainly two specific challenges related to temperature measurement in furnaces: types of oxidizing and reducing atmospheres in furnaces used in microelectronics fabrication.

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