The unit’s database is built on thousands of native gas runs to establish correction functions that account for both thermal and physical differences among gases.
The Series features a corrosion-resistant Hastelloy C-22 sensor for long-term operation. Settling time is less than a second and full-scale accuracy is 1%. Both versions achieve internal to external leak integrity for process gases found in CVD, solar, and other processes.
Specifications include 3 sccm to 50 slm (depending on model number) full-scale flow range; flow accuracy of ±1% set-point 35 to 100%, ±0.35% full scale 2 to 35%, ±3% with selected gas feature; < 0.2% S.P. repeatability and reproducibility; ±0.5% full scale (included in accuracy) linearity; and <1 sec (within 2% for steps 0 to 10 through 0 to 100%) response (settling) time.
Omega Engineering Inc., One Omega Dr., Box 4047, Stamford, CT 06907, (888) 826-6342, www.omega.com
