Your country is not included? Please visit our global website Language Dry Vacuum Pumps and Liquid Pumps for the Semiconductor Industry KNF offers state-of-the-art oil-free vacuum pumps and liquid pumps that meet the demanding standards of the semiconductor industry. 01 01 Few industries consistently push the boundaries of what is physically possible like the semiconductor industry. For decades, it has delivered one breakthrough after another, increasing the computational power of microchips while enabling ever greater miniaturization. To continue this quest for innovation, the semiconductor industry relies on cutting-edge technologies from a variety of disciplines, including pump technology. KNF is proud to support this innovative industry with state-of-the-art diaphragm pump technology and unique customized solutions. Why Pumps Are Essential for Semiconductor Manufacturing All of these tasks require pumps with outstanding reliability, cleanliness, robustness, performance and many more, such as chemical compatibility, compactness or low vibration. Because of these demanding requirements, diaphragm pumps are the technology of choice for a variety of tasks in the semiconductor industry. The Right Pump for Every Step of the Manufacturing Process During the etching process, liquid pumps are needed to handle ultrapure water and the aggressive acids used. Quality control is critical to most processes in the semiconductor industry, including media and air control. KNF offers pump solutions for all types of gas and liquid applications, as well as clean room monitoring technologies. Dry Vacuum Pumps Are Essential for Semiconductor Manufacturing Operating at the forefront of miniaturization, the semiconductor industry relies heavily on extreme precision throughout the manufacturing process. One way to achieve this precision is to eliminate all contaminants from the manufacturing process. This requires many processes to be performed under clean room or even ultra-high vacuum conditions. To create an ultra-high vacuum, a positive displacement pump such as a diaphragm pump is typically used to create a deep vacuum, which can then be further evacuated by a turbomolecular pump and sometimes an ion getter pump. Areas That Benefit From Our Diaphragm Pump Technology Areas That Benefit From Our Diaphragm Pump Technology Why Diaphragm Pumps Are the Ideal Choice for Vacuum Generation In addition to running completely dry, diaphragm pumps can start against vacuum, and most diaphragm pumps can run indefinitely at maximum vacuum without overheating. They are also gas-tight, robust and reliable, requiring little or no maintenance. With KNF diaphragm pumps, customers also have the choice of modern brushless DC motors, which can be parametrized individually and offer precise digital control. Inert Gas Recirculation for Lithography Lasers The semiconductor industry also uses a number of different gases in its processes. In particular, lithography processes require inert gases for operating special lasers. These lasers are filled with gases such as argon, neon or xenon. Since these gases are costly, reusing them is an effective way to reduce operating costs. Diaphragm pumps are the ideal compressors for this purpose. They do not contaminate the gases and, more importantly, they are gas-tight, which minimizes media loss and therefore costs. Why Diaphragm Pumps Should Handle Semiconductor Process Fluids All KNF liquid diaphragm pumps can be customized flexibly, economically and quickly with many options for motors, pump materials, mechanical parts, electrical and hydraulic connections, as well as digital customization options for advanced controllability. In this way, KNF can provide highly individualized solutions from batch size one. KNF Smooth Flow Technology Paves the Way for Diaphragm Pumps in Semiconductor Applications For applications that require very low levels of pulsation, KNF offers special Smooth Flow pumps that reduce pulsation to an absolute minimum. This allows KNF technology to be used in areas where conventional diaphragm pumps would generate too much pulsation. Especially ink transfer systems benefit greatly from these properties, since many inks are sensitive or challenging to other pump technologies due to their abrasiveness as it is the case with many conductive inks. How OEMs and Semiconductor Manufacturers Benefit From Customized KNF Pumps Using a unique modular design approach, KNF can quickly, reliably and cost-effectively tailor pumps to the specific needs of an application, from batch size one on up. In addition to the above-mentioned customization options, we are capable to customize pumps to the extent of the physical possible in close collaboration with our customers, resulting in innovative and perfectly fitting pump technology and partnerships that often last for decades. Get in touch with our technical experts to discuss your individual needs! Contact Us Do you want to find out more about our customized pump solutions and service opportunities? Get in touch with our local sales representatives.