Piezo scanners
A variety of closed-loop planar piezo scanners and controllers include advanced digital features for atomic force and scanning probe microscopy.
Features & benefits
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Compared to conventional piezo-tube scanners, the low-bow, flexure-guided piezo stages are run in closed-loop mode and provide significantly lower out-of-plane motion (flatness) and better linearity
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New lead-free piezo material allows resolution down to 20 picometers and less than 1-nm hysteresis
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Flexure stages with 1,800-micron travel ranges and many different configurations from single axis to six-axis systems available
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Self-locking ultrasonic motor stages with travel ranges to 200 mm are available for prepositioning, and as a stable base for high-speed piezo scanners
Physik Instrumente L.P.
(508) 832-3456
pi-usa.us