Motion System Design
Piezo scanners

Piezo scanners

A variety of closed-loop planar piezo scanners and controllers include advanced digital features for atomic force and scanning probe microscopy.

Features & benefits

  • Compared to conventional piezo-tube scanners, the low-bow, flexure-guided piezo stages are run in closed-loop mode and provide significantly lower out-of-plane motion (flatness) and better linearity

  • New lead-free piezo material allows resolution down to 20 picometers and less than 1-nm hysteresis

  • Flexure stages with 1,800-micron travel ranges and many different configurations from single axis to six-axis systems available

  • Self-locking ultrasonic motor stages with travel ranges to 200 mm are available for prepositioning, and as a stable base for high-speed piezo scanners

Physik Instrumente L.P.
(508) 832-3456

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