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Machine Design

Precision vacuum stages

Model MT105-LM-HV precision, high-performance stages are suitable for ultrahigh vacuum applications. A compact, two-axis (XZ) version offers 30 or 50-mm travel range with a positioning accuracy of 3 microns and repeat-ability of ±0.2 micron. It can be provided as a classic XY stage without adapter plate or configured as a XYZ system. Driven by a piezomotor, each stage includes stainless-steel crossed-roller-linear bearings for smooth motion and good load capacity. Both the base and saddle are made from high-stiffness aluminum. All other components and hardware are selected for ultrahigh vacuum use (10E-10 torr).

Steinmeyer Inc.
56 Middlesex Turnpike, Suite 200
Burlington, MA 01803
(781) 273-6220

© 2011 Penton Media, Inc.

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