Gas-pressure regulators

July 11, 2001
A series of gas-pressure regulators targets ultrahigh-purity and low-particulate requirements in semiconductor-wafer manufacturing.

A series of gas-pressure regulators targets ultrahigh-purity and low-particulate requirements in semiconductor-wafer manufacturing. Series 700 is designed for ultrahigh-purity inert or low-hazard gases, such as halocarbons, carrier, and cylinder purge gases. Series 710 uses a poppet connected directly to the diaphragm for positive shutoff. Its tied diaphragm is needed to handle process gases. Features of both series include an onsite adjustable pressure limit, a sealed bonnet to prevent gas leakage in case of diaphragm failure, metal-tometal diaphragm seals for high-leak integrity, and lateral flow passages for complete internal purge. Single metal-tometal seal and isolated thread design prevent particle entrapment.

Concoa, 1501 Harpers Rd., Virginia Beach, VA 23454, (800) 225-0473.

Sponsored Recommendations

Aug. 22, 2025
Discover how to meet growing customer demands for custom products without overextending your engineering team. Learn how scaling your automation strategy can help you win more...
Aug. 22, 2025
Join industry leaders to explore how cutting edge digital technologies are transforming factories. Learn how to boost throughput, enhance flexibility, and accelerate your digital...
Aug. 22, 2025
Explore the future of manufacturing. Learn how to leverage the latest digital technologies and strategies to build a more efficient, agile, and resilient digital factory.
Aug. 21, 2025
A look into the latest improvements in motion control through high-performance drives, AI enhancements, and faster communication protocols.

Voice your opinion!

To join the conversation, and become an exclusive member of Machine Design, create an account today!