Scanning for Ideas: A heater for making memories

Oct. 11, 2007
A company that developed phase-change memories needed a heated cluster tool for deposition processes and other manufacturing steps.

The resulting tool from Momentive Performance Materials, Strongsville, Ohio (momentiveceramics. com), uses a rotating heater made of pyrolytic boronnitride ceramics. The device can reach 1,500°, heats up at 600°C/min, and has a thermal uniformity greater than 99%. A quartz separating plate serves processes or materials that need temperatures above 300°C; for lower temperatures, the plate is copper.

Momentive Performance Materials rotating heater made of pyrolytic boronnitride ceramics

Voice your opinion!

To join the conversation, and become an exclusive member of Machine Design, create an account today!