Precise positioning puts wafers right where you want them
July 27, 2006
The HT-03-LM vertical positioning stage from Steinmeyer Inc.'s FMD Div., Burlington, Mass., moves loads only 3 mm, but with an accuracy of 2µm and repeatability of 20 nm.
The HT-03-LM vertical positioning stage from Steinmeyer Inc.'s FMD Div., Burlington, Mass. (steinmeyer.com), moves loads only 3 mm, but with an accuracy of 2µm and repeatability of 20 nm. A piezo linear motor driving a 10:1 ratio wedge powers the unit. Precision cross-roller bearings provide rigidity and smooth motion. The aluminum alloy device weighs about 8 lb but handles load forces up to 45 lb. Top speed is 25 mm/sec and feedback comes from a linear encoder with 0.1-µm resolution. The stage is said to be ideal for the semiconductor, fiber-optic, laser, robotic, and medicaldevice industries.
