Micropositioning stages

May 5, 2005
Micropositioning systems provide 50-mm minimum incremental motion and can be combined to form XY and XYZ systems for multiaxis positioning and alignment applications.

Micropositioning systems provide 50-mm minimum incremental motion and can be combined to form XY and XYZ systems for multiaxis positioning and alignment applications. The M-110, M-111, and M-112 motorized translation stages have ultrahigh resolution, provide linear motion of 5, 15, and 25 mm, and can be equipped with piezo drives for fast scanning and higher (1-nm) resolution. The stages are designed for research and industrial applications including metrology, micromachining, medical technology, micromanipulation, biotechnology, photonics packaging automation, quality control, and test equipment. Also available are leadscrew drives (lower cost) and ball-screw drives (continuous operation) driven by stepper motors and closed-loop servomotors. An encoder on the dc servomotor version features 0.007- m resolution/count.

PI (Physik Instrumente) L.P.
16 Albert St.
Auburn, MA 01501
(508) 832-3456
www.pi-usa.us

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