Sealing Materials For IC Processing

Aug. 18, 2005
The Superior series of fluroelastomer materials comes in two grades.

Grade F815, a black material, free of metal fillers, minimizes particle emission and eliminates metal contamination. Maximum operating temperature is 220°C. Grade F850, a white compound with enhanced plasma resistance, has a maximum operating temperature of 200°C. Typical applications are in o-rings and specialshaped seals used in semiconductor processing.

Simrit Div. of Freudenberg-NOK., 47690 East Anchor Ct., Plymouth, MI 48170, 1-866-2SIMRIT, simrit.com

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