Rotary stages provide unlimited angle of rotation, and two goniometers have an adjustment range of 0.11 rad. By assembling them into multiaxis combinations, complex motion sequences are possible. Equipped with a piezo drive, the nanopositioners's low-friction components give excellent repeatable accuracy and high resolution. The smallest increment is about 40 rad. Also available is a specially developed integrated opticalmeasuring-system that uses a laser diode with 100-nm resolution.