Machine Design

Instrument Measures 0.01 Micron Transparent Objects

The LT-9000 Series of laser confocal displacement meters measures 0.01-μm thicknesses on transparent as well as opaque objects, using a single sensor head.

Measurement modes include measuring profiles, object thickness, angle measurement, and cross-sectional areas. The 2-μm-diameter laser beam focuses on the target surface through an objective lens that vibrates vertically at high speed by means of a tuning fork. Beam reflectors from the target surface converge on a light-receiving element in the sensor head. Accuracy is unaffected by the material surface, color, angle, wetness, or irregularity. A built-in microscope gives topographic surface details. Also included is a handheld remote control. Typical applications are in semiconductors, packaging, PCBs, and optics.

Keyence Corp. of America, 50 Tice Blvd., Woodcliff Lake, NJ 07667, (888) 539-3623,

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