Machine Design

Scanning for Ideas: A heater for making memories

A company that developed phase-change memories needed a heated cluster tool for deposition processes and other manufacturing steps.

The resulting tool from Momentive Performance Materials, Strongsville, Ohio (momentiveceramics. com), uses a rotating heater made of pyrolytic boronnitride ceramics. The device can reach 1,500°, heats up at 600°C/min, and has a thermal uniformity greater than 99%. A quartz separating plate serves processes or materials that need temperatures above 300°C; for lower temperatures, the plate is copper.

Momentive Performance Materials rotating heater made of pyrolytic boronnitride ceramics

TAGS: Technologies
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