How To Improve Energy Efficiency and Reduce CO2 Emissions With Next-generation Purge Systems

As semiconductor manufacturers are facing mounting pressures to reduce their energy consumption and carbon dioxide (CO2) emissions, the push to become carbon neutral is a gargantuan international effort. Using piezo-based valve technology in the design of nitrogen purge systems reaps many benefits — including reducing carbon emissions by up to 4 percent, as demonstrated in a large semiconductor fab.