It can be either a single or three-axis device with a standard travel distance of 25 mm. Straightness, or flatness runout is 3 m, but versions with 1 m of runout are available. The device includes a precision preloaded leadscrew with 0.5 mm of pitch coupled to a dc motor with a rotary encoder.
The single-axis table weighs about 0.5 kg, but handles loads to 20 N. Its positional accuracy is 5 µm with repeatability of ±1 µm. The standard stage is made of anodized aluminum, includes backlash-free preloaded slides for precise guidance, noncontact limit switches, and a 63-mm square footprint. Options include preparation for clean-room and vacuum compatibility, different encoder resolutions, and different screw pitches for higher speeds.