Motion System Design
Precision vacuum stages

Precision vacuum stages

Model MT105-LM-HV precision stages are suitable for ultrahigh vacuum applications.

Features & benefits

  • Two-axis (XZ) version travels 30 or 50 mm with positioning accuracy of 3 µm and repeatability of ±0.2 µm

  • Classic XY stage (without adapter plate) or XYZ configuration; piezomotor driven, stainless-steel crossed-roller-linear bearings for smooth motion; stiff aluminum base and saddle

  • All other components and hardware for ultrahigh vacuum use; 10E-10 torr

Steinmeyer Inc.
(781) 273-6220
feinmess.de/content/cnt_cnt/docid_708/iso_en

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