Selecting compact valve manifolds for semiconductor gas boxes
July 30, 2025
Exploring the criteria — including size, function and connection options — for pilot valve manifolds deployed in semiconductor tool gas boxes.
Semiconductor manufacturing places unique demands on the valve manifold that controls a tool’s process gasses. However, not all manifolds offer the right mix of features for the job. This white paper will provide an overview of pilot valve manifolds in semiconductor tool gas boxes, exploring how various gasses are used, features to look for and an example of a manifold that meets the performance criteria necessary to excel in complex and tight installations.
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