Gas-phase filters

    July 11, 2001
    Epix (environmental protection ion exchange) gas-phase filters remove trace amounts of airborne molecular contamination (AMC).

    Epix (environmental protection ion exchange) gas-phase filters remove trace amounts of airborne molecular contamination (AMC). The filters remove acidic, basic, and neutral salt AMCs by chemical adsorption through ion exchange and physical absorption. They are specially designed to eliminate ammonia, amine, and organic contamination that negatively affect DUV lithography applications. The filters remove AMCs at ppb and ppt levels. Features include no gas emissions of chemical contaminants from the filter material and no discharge of adsorped impurities for fluctuations in temperature.

    Ebara Technologies Inc., 51 Main Ave., Sacramento, CA 95838, (916) 920-5451.

    Continue Reading

    Sponsored Recommendations

    March 31, 2025
    Unlike passive products - made of simple carbon springs - the bionic prostheses developed by Revival Bionics are propulsive, equipped with a motor and an artificial Achilles tendon...
    March 31, 2025
    Electric drives are a key technology for the performance of machines, robots, and power tools. Download this guide for an introduction to high-quality mechatronic drive systems...
    March 31, 2025
    Discover the world of maxon drive technology: motors, gearheads, sensors, controllers, and accessories. Configure your drive system online, including all relevant product and ...
    March 31, 2025
    Share current page XSun designs and manufactures a drone that is both energy-independent and can make its own decisions, for fully-automated missions. The company needed reliable...

    Voice your opinion!

    To join the conversation, and become an exclusive member of Machine Design, create an account today!