Heated silicon-nitride trap

    July 11, 2001
    A heated vapor sublimation trap, which has heaters at the inlet to prevent clogging, removes contaminants from vacuum process systems before they reach the pump.

    A heated vapor sublimation trap, which has heaters at the inlet to prevent clogging, removes contaminants from vacuum process systems before they reach the pump. The trap catches ammonium chloride byproducts generated in the semiconductor process LPCVD silicon nitride. The two-stage design traps effluent by-products in the first stage and particulates in the second.

    HPS Products MKS Inc., 5330 Sterling Dr., Boulder, CO 80301, (800) 345-1967.

    Continue Reading

    Sponsored Recommendations

    June 27, 2025
    Ensure workplace safety and compliance with our comprehensive Lockout/Tagout (LOTO) Safety Training course. Learn critical procedures to prevent serious injuries.
    June 27, 2025
    Join our expert webinar to discover essential safety control measures and best practices for engineering a truly safe and compliant industrial environment.
    June 25, 2025
    An innovative aircraft with electric drives combines the best of both worlds. The cross between drone and helicopter could mean significantly faster and more efficient air emergency...
    June 25, 2025
    Effective when other materials fail, ceramics are particularly suitable for applications requiring wear and chemical resistance, sliding characteristics or biocompatibility. Discover...

    Voice your opinion!

    To join the conversation, and become an exclusive member of Machine Design, create an account today!