Lithography's latest leap

July 11, 2001
A prototype extreme ultraviolet lithography system recently made its debut at the Dept. of Energy's Sandia National Labs in Livermore, Calif.

Visible in this CAD view of the test stand is the extreme ultraviolet light (EUVL) beam (colored purple) generated from a plasma source in the top righthand side of the apparatus


A prototype extreme ultraviolet lithography system recently made its debut at the Dept. of Energy's Sandia National Labs in Livermore, Calif. Hopes are that EUV techniques will lead to circuit features of 35 nm or less.

The prototype stepper, called the Engineering Test Stand (ETS), is not slated for commercial production for at least four years. It is expected to produce features of about 70 nm initially. It was developed via a collaborative effort among three U.S. Dept. of Energy national laboratories and a consortium of semiconductor companies called the EUV LLC. The consortium includes Intel, Motorola, Advanced Micro Devices Inc., Micron Technology Inc., Infineon Technologies, and IBM. The three DOE national laboratories are Lawrence Berkeley National Laboratory, Lawrence Livermore National Laboratory, and Sandia National Laboratories in Calif.

LLC partners and lithography tool suppliers during the next year will refine the technology and get it ready to create a prototype commercial machine. Sandia is responsible for development of the extreme ultraviolet light source for the lithography tool, and handles system integration and refinement of light-sensitive chemicals used in device patterning. Lawrence Berkeley National Laboratory provides expertise in measuring the performance of components used in the tool's printmaking "camera," using bright extreme ultraviolet light created by the Advanced Light Source synchrotron.

Sponsored Recommendations

March 31, 2025
Unlike passive products - made of simple carbon springs - the bionic prostheses developed by Revival Bionics are propulsive, equipped with a motor and an artificial Achilles tendon...
March 31, 2025
Electric drives are a key technology for the performance of machines, robots, and power tools. Download this guide for an introduction to high-quality mechatronic drive systems...
March 31, 2025
Discover the world of maxon drive technology: motors, gearheads, sensors, controllers, and accessories. Configure your drive system online, including all relevant product and ...
March 31, 2025
Share current page XSun designs and manufactures a drone that is both energy-independent and can make its own decisions, for fully-automated missions. The company needed reliable...

Voice your opinion!

To join the conversation, and become an exclusive member of Machine Design, create an account today!