Seals offer thermal stability

Oct. 6, 2005
Simriz perfluoroelastomer seals provide chemical resistance, thermal stability, and tight sealing performance.

Designed for use in the semiconductor industry, five compounds are available: Simriz 486, 487, 488, 489, and 495.

Simriz 486 is a 75-Durometer white material providing plasma resistance and low particulation with temperatures ranging from 7 to 230°C. Typical uses are in "clean" process applications.

A black perfluoroelastomer, Simriz 487 is for high-temperature applications in the range of 6 to 300°C. The material is for a variety of wet processes.

Simriz 488 is a 70-Durometer white perfluoroelastomer with temperature ranges from 6 to 300°C. It is recommended for several dry processes.

The 65-Durometer clear Simriz 489 provides plasma resistance and low particulation and extractables in a wide range of acid, solvent, and plasma environments. Its temperature range is 6 to 280°C.

The cost-effective, high-performance Simriz 495 is an 80-Durometer black material with a temperature range of 7 to 230°C for use in wet chemistries.

Simrit, 47690 East Anchor Court, Plymouth, MI 48170, (866) 274-6748,

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