The Delta II flow-ratio controller measures, divides, and controls user-specified ratios of mixed gas flows to several zones or chambers.
It features a 20:1 dynamic ratio control range and faster gas-flow response for shorter cycle times and increased throughput. E-diagnostics, which are accessible through an embedded Ethernet interface, permit real-time monitoring without removing the controller or breaking gas lines. The digital control loop maintains tight control independent of the gas mix or changes in input gas flow.
