Motion analyzer for MEMs

The device's fully integrated probe head microscope measures and displays microstructure motions, which simplifies identification of microstructural resonances in all three dimensions. Broadband out-of-plane vibrations are characterized with Laser Doppler Vibrometry (max. 20-MHz, sub-pm resolution) and in-plane displacements with stroboscopic video microscopy (max. 2-MHz, 1-nm resolution). An available second laser measures differential out-of-plane vibrations between scanned and fixed locations. The system easily integrates with probe stations for wafer-level measurements, has excellent image quality, high lateral resolution, and diffraction-limited probe spots. Polytec Inc., 1342 Bell Ave., Suite 3A, Tustin, CA 92780, (714) 850-1835, ext. 13, polytec.com