Surface-mount gas system

July 11, 2001
K1S, a 1.

K1S, a 1.125-in. surface-mount gas system, targets 300-mm semiconductor-fabrication equipment. It is based on substrate modules that connect via a tongue-and-groove configuration and bolt together to connect flow components without special tools. K1S uses active components to bridge the modules, eliminating assembly seals and fasteners. A planar structure allows components to be installed or removed from one direction using a single wrench. The substrate modules feature dowel pins for self-alignment, graphics to help visualize the flow path, and industry-standard seals.

Kinetics Group Inc., 2805 Mission College Blvd., Santa Clara, CA 95054, (408) 727-7740.

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