Machine Design

Ceramic bearings for semiconductors

An expanded line of full ceramic and ceramic hybrid bearings are suited to the semiconductor manufacturing industry. They can withstand the conditions present during semiconductor production — from furnace temperatures that can reach 2,500°F to clean-room 1 air quality.

Bearing materials include silicon nitride, zirconia oxide, alumina oxide, and silicon carbide. Ceramic is nonporous, so its glasslike surface can be used in clean rooms where traditional lubrications and emissions cannot be present. Ceramic is also nonmagnetic, noncorrosive, and has an extremely low rate of thermal expansion, making it suitable for use in silicon-wafer production, where high loads and high temperatures are exhibited during manufacturing.

The Boca Bearing Co.
755 NW 17th Ave.
Delray Beach, FL 33445
(800) 332-3256

© 2011 Penton Media, Inc.

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