The stage has a positional accuracy of 0.015°, repeatability of less than 0.003°, a 20-μm maximum surface runout, 360°/sec speeds, and accelerations greater than 10,000°/sec″. The black-anodized stage is made from low-distortion aluminum alloy and comes with a direct-reading incremental angular encoder with 3,600 lines for 409,600 counts/360° resolution. Options include 10-mmdiameter center aperture, clean-room and vacuum compatibility, and different encoder resolutions.
217 Middlesex Turnpike
Burlington, MA 01803