A new high-precision stage is driven by a voice-coil linear motor and weighs just 1 kg. The unit measures 80 × 50 ×145 mm and comes in two travels: 5 or 7 mm. Incorporating a Renishaw linear scale increases the stage’s resolution to 0.1 μm, repeatability to 1 μm, and positioning accuracy to 3 μm. Typical speed of the stage is 1 m/sec and acceleration is 5 m/sec2.
Steinmeyer Inc.
56 Middlesex Turnpike
Burlington, MA 01803
(781) 273-6220
steinmeyer.com
